The PETS Reactive Ion Etcher (O2/AR/CF4/SF6) is suitable for a variety of surface modification applications and supports multiple process gases, including oxygen (O2), argon (Ar), carbon tetrafluoride (CF4), and sulfur hexafluoride (SF6).
*NOTE: Users of the BNC may be required to complete onsite and/or on-demand training in order to reserve this instrument. Requirements will be shared by the lab prior to your appointment. Please reach out to us through Second Lab messages and we'll be happy to help you plan for your first booking.